A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 644-647

  Lee, Yeolho ^a   Lim, Geunbae ^a   Moon, Wonkyu ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Mass micro balancing; PZT micro cantilever; Self exciting

Indexed keywords

BIOMATERIALS DETECTION; MASS-MICRO-BALANCING; PZT-MICRO CANTILEVER; SELF-EXCITING;

BIOMATERIALS; DNA; ENVIRONMENTAL IMPACT; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES;

BIOSENSORS;

EID: 27544491271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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