Parallel frequency readout of an array of mass-sensitive transducers for sensor applications

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 229-232

  Kim, B H ^a   Maute, M ^a   Prins, F E ^a   Kern, D P ^a   Croitoru, M ^a   Raible, S ^a   Weimar, U ^a   Gopel W ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHEMICAL SENSORS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER APPLICATIONS; PLASTIC COATINGS; READOUT SYSTEMS; SENSORS;

LASER BEAM DEFLECTION METHOD; PARALLEL FREQUENCY READOUT; POLYMER COATED CANTILEVER; POSITION SENSITIVE DETECTOR;

TRANSDUCERS;

EID: 0034205521     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00303-8     Document Type: Article

References (3)

1. [1] M. Maute, S. Raible, F.E. Prins, U. Weimar, D.P. Kern, W. Göpel, Microelec. Eng. 46, 439-442 (1999)
2. [2] H.P. Lang, R. Berger, F. Battiston, et al., Appl. Phys. A 66, 61-64 (1998)
3. [3] J.A. Riddeck, W.B. Bunger, "Organic Solvents", New York: Wiley & Sons (1986)