A membrane actuator based on piezo-polymer-composite technology

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 753-756

  Just, Elmar ^a   Pustan, David ^a   Woias, Peter ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Actuators; Composite; Membrane actuator; Piezo; Polymer; Valve

Indexed keywords

FABRICATION TECHNOLOGIES; MEMBRANE ACTUATORS; PIEZO-POLYMER-COMPOSITE TECHNOLOGY; VALVE;

CASTING; COMPOSITE MATERIALS; LASER APPLICATIONS; MEMBRANES; MICROMACHINING; POLYMERS; VALVES (MECHANICAL);

ACTUATORS;

EID: 27544484018     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496526     Document Type: Conference Paper

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