Piezoelectric microactuators in polymer-composite technology

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1007-1010

  Friese, C ^a   Goldschmidtboing F ^a   Woias, P ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Curing; Fabrication; Microactuators; Microelectromechanical devices; Micromechanical devices; Piezoelectric actuators; Piezoelectric materials; Polymers; Predictive models; Testing

Indexed keywords

ACTUATORS; COMPOSITE MATERIALS; CURING; DIE CASTING INSERTS; FABRICATION; MATERIALS TESTING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; POLYMERS; SILICONES; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

MICROMECHANICAL DEVICE; NOVEL POLYMERS; PIEZO-ACTUATORS; PIEZOELECTRIC MICRO-ACTUATORS; POLYMER COMPOSITE TECHNOLOGY; PREDICTIVE MODELS; PROCESS DEVELOPMENT; SIMULATION MODEL;

PIEZOELECTRIC ACTUATORS;

EID: 84944731615     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216938     Document Type: Conference Paper

References (6)

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4. M. Richter et.al., "Batch fabrication of silicon micropumps", Proc. Transducer '01, Munich, pp.936-939
5. K.J. Yoon, S. Shin, H.C. Park, N.S. Goo, "Design and manufacture of a lightweight piezo-composite curved actuator", Smart Materials and Structures, 11 (2002), pp.163-168.
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