GaN film growth on Si substrate for sub-wavelength optical MEMS

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1043-1046

  Hu, F R ^a   Ochi, K ^a   Choi, B S ^a   Kanamori, Y ^a   Hane, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Epitaxy; GaN; MBE; Resonant grating

Indexed keywords

GAN; GRATING STRUCTURE; RESONANT GRATING; WAVELENGTH;

ATOMIC FORCE MICROSCOPY; GALLIUM NITRIDE; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MOLECULAR BEAM EPITAXY; OPTICAL SYSTEMS; PHOTOLUMINESCENCE; SEMICONDUCTOR LASERS; SILICON;

FILM GROWTH;

EID: 27544483709     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496634     Document Type: Conference Paper

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