Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 2091-2094

  Chan, Helena K L ^a   Takei, Masahiko ^b   Pang, Stella W ^a   Veeneman, Rebecca A ^a   Zellers, Edward T ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE

Author keywords

Gas chromatography; Microfabrication; Preconcentrator

Indexed keywords

CHROMATOGRAPHIC SEPARATIONS; MICROFABRICATORS; PRECONCENTRATORS; VAPOR TRAPPING;

ADSORBENTS; CARBON; CHEMICAL ANALYSIS; ELECTRIC RESISTANCE; GAS CHROMATOGRAPHY; HEAT TRANSFER; REACTIVE ION ETCHING; SEALING (CLOSING); VAPORS; VOLATILE ORGANIC COMPOUNDS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544476994     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497515     Document Type: Conference Paper

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