A MEMS RF phase and frequency modulator

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1059-1062

  Reichenbach, R B ^a   Aubin, K L ^a   Zalalutdinov, M ^a   Parpia, J M ^a   Craighead, H G ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

Entrainment; Phase Modulation; RF MEMS; Voltage Controlled Oscillator

Indexed keywords

ENTRAINMENT; OUTPUT PHASE; RF MEMS; VOLTAGE CONTROLLED OSCILLATOR;

FREQUENCY MODULATION; HEAT LOSSES; NATURAL FREQUENCIES; OSCILLATORS (MECHANICAL); PHASE MODULATION; TUNERS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544471079     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496638     Document Type: Conference Paper

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