Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1375-1379

  Lee, Yung Chun ^a   Wu, Chun Ying ^a   Jang, Ling Sheng ^a   Hsu, Yi Chu ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Excimer Laser; Microfabrication; Microlens

Indexed keywords

EXCIMER LASERS; MICROMACHINING; MICROOPTICS; MICROSTRUCTURE; POLYCARBONATES; SAMPLING;

MICROFABRICATION; MICROLENS; PROFILE SHAPES; SURFACE PROFILE;

LENSES;

EID: 27544460681     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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