Plasma immersion ion implantation of nitrogen into H13 steel under moderate temperatures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 1-2, 2005, Pages 204-207

  Ueda, M ^a   Leandro, C ^b   Reuther, H ^c   Lepienski, C M ^d  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^d FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

H13 steel; Nitrogen implantation; Plasma immersion ion implantation

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DIFFUSION; GLOW DISCHARGES; HARDENING; ION BOMBARDMENT; NITROGEN; PLASMAS; QUENCHING; STEEL; VOLTAGE CONTROL;

GLOW DISCHARGE OPTICAL SPECTROSCOPY (GDOS); H13 STEEL; NITROGEN IMPLANTATION; PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 27444439302     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.116     Document Type: Conference Paper

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