Modification of materials by high energy plasma ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 1-2, 2005, Pages 229-233

  Lorusso, A ^a   Belloni, F ^a   Doria, D ^a   Nassisi, V ^a   Wolowski, J ^b   Badziak, J ^b   Parys, P ^b   Krasa J ^c   Laska L ^c   Boody, F P ^d   Torrisi, L ^e   Mezzasalma, A ^e   Picciotto, A ^e   Gammino, S ^f   Calcagnile, L ^g   Quarta, G ^g   Bleiner, D ^h  

^a INFN SEZIONE DI LECCE   (Italy)

^b SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^c INSTITUTE OF PHYSICS   (Czech Republic)

^d Ion Light Technologies GmbH   (Germany)

^e INFN SEZIONE DI ROMA   (Italy)

^f INFN LABORATORI NAZIONALI DEL SUD   (Italy)

^g Swiss Federal Laboratories for Materials Research ^*  (Italy)

^h SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Implantation of laser produced ions; Ion diagnostic measurements; Laser produced plasma

Indexed keywords

GERMANIUM; LASER PULSES; MASS SPECTROMETRY; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ELECTROSTATIC ION ENERGY ANALYZER (IEA); IMPLANTATION OF LASER-PRODUCED IONS; ION COLLECTORS; ION DIAGNOSTIC MEASUREMENTS;

LASER PRODUCED PLASMAS;

EID: 27344460718     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.121     Document Type: Conference Paper

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