Diffraction analysis for periodic nano-scale apertures, scatterers and absorbers

Measurement Science and Technology

Volumn 16, Issue 11, 2005, Pages 2208-2212

  Park, Yeonjoon ^a   Wright, John D ^b   Jensen, Jared D L ^c   King, Glen C ^d   Choi, Sang H ^d  

^a SCIENCE AND TECHNOLOGY CORPORATION   (United States)

^b Tabb HS   (United States)

^c Grafton HS   (United States)

^d NASA LANGLEY RESEARCH CENTER   (United States)

Author keywords

2D grating; Calibration; e beam lithography; Fraunhofer diffraction; Nanometrology; Optical characterization; Rayleigh criterion

Indexed keywords

ABSORPTION; CORRELATION METHODS; LASERS; SCATTERING;

2D GRATING; E-BEAM LITHOGRAPHY; FRAUNHOFER DIFFRACTION; NANOMETROLOGY; OPTICAL CHARACTERIZATION; RAYLEIGH CRITERION;

DIFFRACTION;

DIFFRACTION; MEASUREMENT METHOD; NANOTECHNOLOGY;

EID: 27344439473     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/11/011     Document Type: Article

References (11)

1. Dai G, Koenders L, Pohlenz F, Dziomba T and Danzebrink H-U 2005 Accurate and traceable calibration of one-dimensional gratings Meas. Sci. Technol. 16 1241-9
2. Barnes W, Dereux A and Ebbesen T 2003 Surface plasmon subwavelength optics Nature 424 824-30
3. Barnes W, Murray W, Dintinger J, Devaux E and Ebbesen T 2004 Surface plasmon polaritons and their role in the enhanced transmission of light through periodic arrays of subwavelength holes in a metal film Phys. Rev. Lett. 92 107401
4. Degiron A, Lezec H, Barnes W and Ebbesen T 2002 Effects of hole depth on enhanced light transmission through subwavelength hole arrays Appl. Phys. Lett. 81 4327-9
5. Ebbesen T, Lezec H, Ghaemi H, Thio T and Wolff P 1998 Extraordinary optical transmission through sub-wavelength hole arrays Nature 391 667-9
6. Chasse T et al 2003 Mo/Si multilayers for EUV lithography by ion beam sputter deposition Vacuum 71 407-15
7. Petra S, Feenstra L, Hogervorst W and Vassen W 2004 Nanolithography with metastable helium atoms in a high-power standing-wave light field Appl. Phys. B 78 133-6
8. Wu M T, Leu I C and Hon M H 2004 Growth characteristics of oxide during prolonged anodization of aluminum in preparing ordered nanopore arrays J. Vac. Sci. Technol. B 22 2326
9. Routkevitch D, Tager A, Haruyama J, Almawlawi D, Moskovits M and Xu J 1996 Nonlithographic nano-wire arrays: fabrication, physics, and device applications IEEE Trans. Electron Devices 43 1646-58
10. Ghatak A and Thyagarajan K 1989 Optical Electronics (Cambridge: Cambridge University Press)
11. Woodruff D P and Delchar T A 1994 Modern Techniques of Surface Science (Cambridge: Cambridge University Press)