The influence of the ion implantation temperature and the dose rate on smart-cut© in GaAs

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 1-2, 2005, Pages 142-145

  Webb, M ^a   Jeynes, C ^a   Gwilliam, R ^a   Too, P ^a   Kozanecki, A ^b   Domagala, J ^b   Royle, A ^a   Sealy, B ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b POLISH ACADEMY OF SCIENCES   (Poland)

Author keywords

Blistering; Exfoliation; Hydrogen implantation; Smart cut

Indexed keywords

BUBBLES (IN FLUIDS); GALLIUM COMPOUNDS; HYDROGEN; ION BEAMS; MICROCRACKS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

EXFOLIATION; HYDROGEN IMPLANTATION; PLATELETS; SMART-CUT;

ION IMPLANTATION;

EID: 27344439322     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.104     Document Type: Conference Paper

References (6)

1. M. Bruel Nucl. Instr. and Meth. B 108 1996 313
2. E. Jalaguier Electon. Lett. 34 4 1998
3. Q. Tong, L. Huang, and U. Gosele J. Electon. Mat. 29 7 2000 928
4. G. Gawlick Vacuum 70 2003 103
5. I Radu, PhD thesis, Max Plank Institute, Halle, Germany (2003).
6. I. Radu J. Appl. Phys. 94 12 2003 7820