GaAs on Si: Towards a low-temperature "smart-cut" technology

Vacuum

Volumn 70, Issue 2-3, 2003, Pages 103-107

  Gawlik, Grzegorz ^a   Jagielski, Jacek ^a   Piatkowski, Bronisław ^a  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

Direct bonding; GaAs; Hydrogen; Ion implantation

Indexed keywords

GLASS; HYDROGEN; ION IMPLANTATION; LIGHT EMITTING DIODES; SILICON; SUBSTRATES;

DIRECT BONDING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 12244307883     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00627-9     Document Type: Conference Paper

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