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Volumn 2, Issue 7, 2005, Pages 2480-2483

Changes induced in electrical properties and deep level spectra of p-AlGaN films by treatment in hydrogen plasma and by proton implantation

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DEEP LEVEL TRANSIENT SPECTROSCOPY; HOLE TRAPS; PROTONS; RADIATION;

DEEP LEVEL SPECTRA; HYDROGEN PLASMA TREATMENT; PROTON IMPLANTATION; RADIATION DEFECTS;

ALUMINUM COMPOUNDS;

EID: 27344433134 PISSN: 16101634 EISSN: None Source Type: Conference Proceeding
DOI: 10.1002/pssc.200461270 Document Type: Conference Paper

Times cited : (1)

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