Temperature controlled laser chemical vapor deposition (LCVD) using thermal imaging

Assembly Automation

Volumn 25, Issue 4, 2005, Pages 293-299

  Jean, Daniel ^a   Lackey, W Jack ^a   Duty, Chad E ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Control systems; Electrodeposition; Image processing; Lasers

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONTROL SYSTEMS; ELECTRODEPOSITION; GRAPHITE; IMAGE PROCESSING; LASER APPLICATIONS; TEMPERATURE CONTROL;

CARBON DEPOSITION; LASER CHEMICAL VAPOR DEPOSITION; THERMAL IMAGING CONTROL SYSTEM;

INFRARED IMAGING;

EID: 27244444244     PISSN: 01445154     EISSN: None     Source Type: Trade Journal    
DOI: 10.1108/01445150510626424     Document Type: Article

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