An ultraprecision six-axis visual servo-control system

IEEE Transactions on Robotics

Volumn 21, Issue 5, 2005, Pages 985-993

  Kim, Jung H ^a   Kuo, Shih Kang ^a   Menq, Chia Hsiang ^a  

^a The Ohio State University   (United States)

Author keywords

Interferometry; Motion estimation; Optical microscope; Visual servoing; Visual tracking

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); FEEDBACK CONTROL; IMAGE PROCESSING; INTERFEROMETRY; MOTION CONTROL; MOTION ESTIMATION; OPTICAL MICROSCOPY; PATTERN RECOGNITION; TRACKING (POSITION);

TRACKING CONTROL; VISUAL SERVO CONTROL SYSTEM; VISUAL SERVOING; VISUAL TRACKING;

SERVOMECHANISMS;

EID: 27144559653     PISSN: 15523098     EISSN: None     Source Type: Journal    
DOI: 10.1109/TRO.2005.847571     Document Type: Article

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