Fabrication of a Fabry-Pérot cavity in a microfluidic channel using thermocompressive gold bonding of glass substrates

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 756-762

  Shao, Hua ^a   Kumar, Dhiraj ^a   Feld, Stewart A ^a   Lear, Kevin L ^a  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

Fabry P rot cavity; Finesse; Gold thermocompressive bonding; Microfluidics

Indexed keywords

BONDING; ETCHING; FLUIDICS; GLASS; GOLD; LIGHT EMITTING DIODES; PHOTOLITHOGRAPHY; PHOTORESISTS;

FABRY-PEROT CAVITY; GOLD THERMOCOMPRESSIVE BONDING; MICROFLUIDIC CHANNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 27144542151     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845447     Document Type: Article

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