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26844463220
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note
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3). Small amount of TEOS was placed in the bottom of the vessel apart from the substrate. The vessel was placed in an oven at 90°C for 2 h. Calcination was performed at 400°C in air for 5 h with a heating rate of 1°C/min. The films were identified by X-ray diffraction (XRD) patterns recorded on a Rigaku Mini-flex. Fourier-transform infrared (FTIR) spectra of the films were recorded using a FTIR-8200PC spectrometer (Shimadzu Co.). Field emission scanning electron microscope (FE-SEM) images were recorded on a Hitachi S-5000L microscope.
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26844437812
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note
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2 were 0-30 and 30 mL/min, respectively. The films were subsequently calcined in flowing air at 400°C for 5 h to remove the surfactant.
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