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Volumn , Issue , 2005, Pages 592-595

Self-assembly of MEMS components in air assisted by diaphragm agitation

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGM AGITATION; LIQUID INTERFACES; MEMS CHIPS; YIELD RATIO;

EID: 26844493755     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1453999     Document Type: Conference Paper
Times cited : (8)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.