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Volumn , Issue , 2005, Pages 592-595
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Self-assembly of MEMS components in air assisted by diaphragm agitation
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DIAPHRAGM AGITATION;
LIQUID INTERFACES;
MEMS CHIPS;
YIELD RATIO;
DIAPHRAGMS;
DRAG;
ENERGY TRANSFER;
INTERFACES (MATERIALS);
MICROPROCESSOR CHIPS;
SELF ASSEMBLY;
SUBSTRATES;
MICROELECTROMECHANICAL DEVICES;
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EID: 26844493755
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2005.1453999 Document Type: Conference Paper |
Times cited : (8)
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References (7)
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