Recent advances in deterministic, low-cost finishing of sapphire windows

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5786, Issue , 2005, Pages 154-164

  Hallock, Bob ^a   Dumas, Paul ^a   Shorey, Aric ^a   Tricard, Marc ^a  

^a QED TECHNOLOGIES   (United States)

Author keywords

Deterministic polishing; Magnetorheological finishing; MRF; Sapphire; Sub aperture

Indexed keywords

ERRORS; FINISHING; LIGHT TRANSMISSION; OPTICAL ENGINEERING; POLISHING; RHEOLOGY; SURFACE ROUGHNESS; WAVEFRONTS; WINDOWS;

DETERMINISTIC POLISHING; MAGNETORHEOLOGICAL FINISHING (MRF); SAPPHIRE WINDOWS; SUB-APERTURE;

SAPPHIRE;

EID: 26844431537     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603930     Document Type: Conference Paper

References (23)

1. D.C. Harris, Materials for Infrared Windows and Domes, SPIE Press Bellingham, Washington (1999).
2. D.C. Harris, Infrared Window and Dome Materials, SPIE Educational Short Course Notes, 2004.
3. F. Schmid, C.P. Khattak, K.A. Schmid, S.G. Ivanova, D.C. Harris, "Increase of High Temperature Strength of Saphire by Polishing, Heat Treatments and Doping,"
4. P.B. Narayn, A.S. Brar, J.P. Sharma, "Lapping and Polishing of Ceramics: Some Concerns and Solutions," Solid State Technology, April 1988.
5. J.A. Menapace, B. Penetrante, D. Golini, A. Stromba, P.E. Miller, T. Parham, M. Nichols and J. Peterson, "Combined Advanced Finishing and UV-Laser Conditioning for Producing UV Damage Resistant Fused Silica Optics," Laser Induced Damage in Optical Materials, Exarhos, Guenther, Lewis, Soileau, Stolz eds, Proc. SPIE 4679: 56-68, 2002.
6. Steven R. Arrasmith, Stephen D. Jacobs, John C. Lambropoulos, Alexander Maltsev, Donald Golini,and William I. Kordonski, "The Use of Magnetorheological Finishing (MRF) to Relieve Residual Stress and Subsurface Damage on Lapped Semiconductor Silicon Wafers," 46th Annual SPIE Conference; SPIE 4451, 2001.
7. D. Golini, Schneider, G., Flug, P., and Demarco, M., " Magnetorheological Finishing," Optics & Photonics News, October 2001.
8. M. Tricard and D. Golini, "High precision photomask polishing with magneto-rheological finishing (MRF)," Meeting of the American Society for Precision Engineering, 120-125, 2002.
9. D. Golini, W.I. Kordonski, P. Dumas, S. Hogan, "Magnetorheological Finishing (MRF) in Commercial Precision Optics Manufacturing," Optical Manufacturing and Testing III, P. Stahl, ed., Proc. SPIE 3782, pp. 80-91, 1999.
10. D. Golini, M. DeMarco, W. Kordonski, J. Bruning, "MRF polishes calcium fluoride to high quality," Laser Focus World, July 2001.
11. C.J. Evans, E. Paul, D. Dornfield, D.A. Lucca, G. Byrne, M. Tricard, F. Klocke, O. Dambon, and B.A. Mullany, "Material removal mechanisms in lapping and polishing," CIRP Annals 2003, 52(2) 2003.
12. V. H. Bulsara, Y. Ahn, S. Chandrasekar, and T. N. Farris, "Mechanics of Polishing", Transactions of the ASME, 65, pp. 410-416, 1998.
13. D. Golini, S. Jacobs, W. Kordonski, and P. Dumas, "Precision Optics Fabrication Using Magnetorheological Finishing," in Advanced Materials for Optics and Precision Structures, Mark Ealey, R. A. Paquin, and T.B Parsonage, eds., Proc. SPIE CR67, pp. 251-274, 1997.
14. A. B. Shorey, "Mechanisms of material removal in magnetorheological finishing (MRF) of glass," Ph.D. dissertation (University of Rochester, Rochester, NY, 2000).
15. Communication with V. Liberman, MIT Lincoln Laboratory.
16. www.saphikon.com, Saint-Gobain Crystals, 33 Powers St., Milford, NH 03055.
17. "Properties and Benefits of Sapphire: A Quick Reference Guide," Saint-Gobain Crystals, 33 Powers St., Milford, NH 03055.
18. Verifire MSTTM 1550 specifications, Zygo Corporation, Laurel Brook Road, Middlefield, CT 06455.
19. V. Bagnoud, M.J. Guardalben, J. Puth, J.D. Zuegel, T. Mooney, and P. Dumas, "High-energy, high-average-power laser with Nd:YLF rods corrected by magnetorheological finishing", Applied Optics, 44, 282-288, 2005.
20. John C. Lambropoulos, Paul D. Funkenbusch, Yi Li, and Jeff Ruckman, "From surface microroughness to subsurface damage," Optical Manufacturing and Testing III, Proc. SPIE 3782, 1999.
21. John C. Lambropoulos, Yi Li, Paul D. Funkenbusch, and Jeff Ruckman, "Non-contact estimate of grinding-induced subsurface damage," Proc. SPIE. 3782:41-50, 1999.
22. www.Crystalsystems.com, Crystal Systems, Inc., 27 Congress St., Salem, Massachusetts, 01970.
23. Dimension 3100 Scanning Probe Microscope, Veeco Instrument Corporation, AFMs, 112 Robin Hill Rd., Santa Barbara, CA 93117.