Low power consumption design of micro-machined thermal sensor for portable spirometer

Tamkang Journal of Science and Engineering

Volumn 8, Issue 3, 2005, Pages 225-230

  Chiu, Nan Fu ^a   Hsiao, Tzu Chien ^a,b   Lin, Chii Wann ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b I SHOU UNIVERSITY   (Taiwan)

Author keywords

ATS; FVC; PEFR; Portable Spirometer; Thermal Anemometeric Chip

Indexed keywords

BIOMEDICAL EQUIPMENT; ELECTRIC POTENTIAL; FLOW MEASUREMENT; HEALTH CARE; MICROMACHINING; PORTABLE EQUIPMENT; PULMONARY DISEASES;

ATS; FVC; PEFR; PORTABLE SPIROMETERS; THERMAL ANEMOMETRIC CHIPS;

MICROSENSORS;

EID: 26444579866     PISSN: 15606686     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (15)

1. Centers for Disease Control and Prevention (CDC), Morbidity and Mortality Weekly Report, Vol. 47, pp. 1022-1025 (1998).
2. U.S. Department of Health and Human Services, National Heart, Lung, and Blood Institute "Data Fact Sheet-Chronic Obstructive Pulmonary Disease (COPD)," May 2001.
3. Anonymous, "Standardization of Spirometry, 1994 Update," Am. J. Respir Crit Care Med, Vol. 152, pp. 1107-1136 (1995).
4. Van Putten, A. F. P. et al., "Multisensor Microsystem for Pulmonary Function Diagnostics," IEEE Sensor Journal, Vol. 2, No. 6 (2002).
5. Chiu, J. P., "Micromachined Anemometer for Spirometric Application," N.T.U. Master Thesis, Taiwan, R.O.C. (1999).
6. Chiu, N. F., "Development of MEMS Hot-Wire Chip for Portable Digital Electronic Spirometric System," N.T.U. Master Thesis, Taiwan, R.O.C. (2001).
7. Jiang, F., Tai, Y. C., Ho, C. M., Karan, R., and Garstenauer, M., "Theoretical and Experimental Studies of Micromachined Hot-wire Anemometers," IEDM, IEEE, pp. 94-139, (1994).
8. Udrea, F., Gardner, J. W., Setiadi, D., Covington, J. A., Dogaru, T., Lu, C. C. and Milne, W. I., "Design and Simulations of SOI CMOS Micro-hotplate Gas Sensor," Sensors and Actuators B, Vol. 78, pp. 180-190 (2001).
9. Van Dijk, G. J. A. and Huijsing, J. H., "Bridge-output-to-frequency Converter for Smart Thermal air-flow Sensors," IEEE Transactions on Instrumentation and Measurement, Vol. 44, No. 4, (1995).
10. Rasmussen, A. and Zaghloul, M. E., "In the Flow with MEMS," IEEE Circuit & Device Journal (1998).
11. Bosch, R., "Micromachined Metal Oxide Gas Sensor Opportunities to Improve Sensor Performance," Sensor and Actuators B, Vol. 73, pp. 1-26 (2001).
12. Bosch, R., "Micromachined Thermal Conductivity Hydrogen Detector for Automotive Applications," IEEE, pp. 1571-1575 (2002).
13. Lin, C. W., Wang, D. H., Wang, H. C. and Wu, H. D., "Prototype Development of Digital Spirometer," Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Vol. 20, No 4 (1998).
14. Oliverira, A., Freire, R. C. S., Deep, G. S. and Lobo, P. C., "An Anemometer with PWM Exciation," IEEE (1995).
15. King, L. V., "On the Convection of Heat From Small Cylinders in a Stream of Fluid: Determination of the Convection Constants of Small Platinum Wires, with Applications to Hot-wire Anemometry," Proc. R. Soc. London, Vol. 90, pp. 563-570, in J. O. Hinze (1914).