Low-energy ion beamline scattering apparatus for surface science investigations

Review of Scientific Instruments

Volumn 76, Issue 8, 2005, Pages 1-15

  Gordon, M J ^a   Giapis, K P ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY FILTERING; MASS-FILTERED ION BEAMLINE SYSTEM; SURFACE SCATTERING; TUNABLE INCIDENT ENERGY;

CHEMICAL REACTIONS; IONIZATION; PLASMAS; SCATTERING;

ION IMPLANTATION;

EID: 26444559126     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1994987     Document Type: Article

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