The study of composition, structure, mechanical properties and platelet adhesion of Ti-O/TiN gradient films prepared by metal plasma immersion ion implantation and deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 222, Issue 1-2, 2004, Pages 81-90

  Wen, F ^a   Huang, N ^a   Sun, H ^a   Wan, G J ^a   Chu, P K ^b   Leng, Y ^c  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Metal plasma immersion ion implantation deposition (MPIII D); Platelet adhesion; Ti O TiN Gradient films; XPS

Indexed keywords

ABRASION; ADHESION; DEPOSITION; ION BEAMS; ION IMPLANTATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STABILITY; GRADIENT FILMS; METAL PLASMA IMMERSION; PLATELET ADHESION;

TITANIUM NITRIDE;

EID: 2642563003     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.12.094     Document Type: Article

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