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Volumn 222, Issue 1-2, 2004, Pages 169-174

Investigation of V/Si mixing induced by swift heavy ions

Author keywords

Ion beam mixing; RBS; SIMS; Swift heavy ion

Indexed keywords

ANNEALING; CATALYSIS; DIFFUSION; ELECTRIC CONDUCTIVITY; HEAVY IONS; ION BEAMS; IRRADIATION; MATHEMATICAL MODELS; MICROELECTRONICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

EID: 2642517307     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.221     Document Type: Article
Times cited : (28)

References (33)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.