Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process

Fire and Materials

Volumn 29, Issue 5, 2005, Pages 295-302

  Shu, Yi Liang ^a   Jeng, Wei Jin ^b   Chiu, Chen Wei ^c   Chen, Chiun Hsun ^c  

^a CHUNGTAI INST HLTH SCI TECHNOL   (Taiwan)

^b Environment Safety and Health Department   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Exhaust duct; Fire protection; Semiconductor; Water mist

Indexed keywords

DUCTS; FLAMMABILITY TESTING; HYDRANTS; NOZZLES; SEMICONDUCTOR DEVICE MANUFACTURE; SPRINKLER SYSTEMS (FIRE FIGHTING); THERMOCOUPLES;

FUME EXHAUST PIPES; SEMICONDUCTOR FABRICATION; WATER MIST SYSTEM;

FIRE PROTECTION;

EID: 26244443797     PISSN: 03080501     EISSN: None     Source Type: Journal    
DOI: 10.1002/fam.890     Document Type: Article

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