Accidental explosions of semiconductor manufacturing gases in Japan

Journal of Loss Prevention in the Process Industries

Volumn 17, Issue 1, 2004, Pages 29-34

  Hirano, Toshisuke ^a  

^a National Res Fustitute of Fire and Disaster   (Japan)

Author keywords

Case studies; Gas explosions; Semiconductor manufacturing; Semiconductor tips

Indexed keywords

DECOMPOSITION; EXPLOSIONS; GAS CYLINDERS; GAS PLANTS; SEMICONDUCTOR MATERIALS;

ACCIDENTAL EXPLOSIONS;

ACCIDENTS;

EXPLOSION;

EID: 0346092568     PISSN: 09504230     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jlp.2003.09.001     Document Type: Article

References (7)

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3. Hirano, T. (2002). Combustion science for safety. Proceedings of the Combustion Institute, 29 (in press).
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7. Yanagida, S., (2002). Private Communication.