Characteristics of fire and explosion in semiconductor fabrication processes

Process Safety Progress

Volumn 21, Issue 1, 2002, Pages 19-25

  Chen, Jenq Renn ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; CHEMICAL INDUSTRY; CORROSIVE EFFECTS; EXPLOSIONS; FABRICATION; FLAMMABILITY; GASES; KNOWLEDGE ACQUISITION; VAPORS; VENTILATION EXHAUSTS;

CORROSIVE GASES; FLAMMABLE GASES; SAFETY KNOWLEDGE; SEMICONDUCTOR FABRICATION;

FIRES;

SAFETY;

EID: 6344263308     PISSN: 10668527     EISSN: None     Source Type: Trade Journal    
DOI: 10.1002/prs.680210106     Document Type: Article

References (12)

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