Molecular dynamics simulations of impact of energetic silicon clusters onto crystalline silicon

Journal of Computer-Aided Materials Design

Volumn 9, Issue 1, 2002, Pages 1-9

  Mazzone, A M ^a  

^a CNR   (Italy)

Author keywords

Cluster deposition; Molecular dynamics; Silicon

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; SILICON; SUBSTRATES;

CLUSTER DEPOSITION; CRYSTALLINE SILICON; ENERGETIC SILICON CLUSTERS; MOLECULAR DYNAMICS SIMULATION;

COMPUTER SIMULATION;

EID: 0037841840     PISSN: 09281045     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023205001182     Document Type: Article

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