Modeling the effects of abrasive size distribution, adhesion, and surface plastic deformation on chemical-mechanical polishing

Journal of the Electrochemical Society

Volumn 152, Issue 9, 2005, Pages

  Bastaninejad, Mahzad ^a   Ahmadi, Goodarz ^a  

^a Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; ADHESION; CHEMICAL MECHANICAL POLISHING; COMPUTER SIMULATION; PLASTIC DEFORMATION; PRESSURE EFFECTS; SURFACE CHEMISTRY; VELOCITY MEASUREMENT;

ABRASIVE SIZE DISTRIBUTION; MODELING; SLURRY CONCENTRATION; SURFACE SOFTENING;

WEAR OF MATERIALS;

EID: 25644443067     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1997156     Document Type: Article

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