A new structure silicon piezoresistive micromachined accelerometer

Chinese Journal of Sensors and Actuators

Volumn 18, Issue 3, 2005, Pages 500-503

  Chen, Xue Meng ^a   Li, Xin Xin ^a   Song, Zhao Hui ^a   Wang, Yue Lin ^a   Huang, Hui ^a   Huang, Shu Sen ^a   Zhang, Kun ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Accelerometer; DRIE; MEMS; Piezoresistive

Indexed keywords

ACCELEROMETERS; ASPECT RATIO; CANTILEVER BEAMS; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY; REACTIVE ION ETCHING; STRESS ANALYSIS;

DRIE; MECHANICAL RIGIDITY; MICRO BEAMS; PIEZORESISTIVE;

SILICON WAFERS;

EID: 25444483070     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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