A piezoresistive accelerometer with axially stressed tiny beams for both much increased sensitivity and much broadened frequency bandwidth

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 91-94

  Huang, Shusen ^a   Li, Xinxin ^a   Wang, Yuelin ^a   Jiao, Jiwei ^a   Ge, Xiaohong ^a   Lu, Deren ^a   Che, Lufeng ^a   Zhang, Kun ^a   Xiong, Bin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Accelerometers; Analytical models; Bandwidth; Design optimization; Finite element methods; Frequency; Piezoresistance; Semiconductor device modeling; Sensor phenomena and characterization; Structural beams

Indexed keywords

ACCELERATION MEASUREMENT; ACCELEROMETERS; ACTUATORS; ANALYTICAL MODELS; BANDWIDTH; MICROSYSTEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SOLID-STATE SENSORS; TRANSDUCERS;

BULK- MICROMACHINING; DESIGN OPTIMIZATION; FINITE ELEMENT METHOD SIMULATION; FREQUENCY; PIEZORESISTANCE; PIEZORESISTIVE ACCELEROMETERS; SILICON ON INSULATOR WAFERS; STRUCTURAL BEAMS;

FINITE ELEMENT METHOD;

EID: 27544435117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215260     Document Type: Conference Paper

References (5)

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