Principles and mechanisms of sub-micrometer particle removal by CO 2 cryogenic technique

Journal of Adhesion Science and Technology

Volumn 19, Issue 9, 2005, Pages 739-751

  Banerjee, Souvik ^a   Campbell, Andrea ^a  

^a Eco Snow Systems   (United States)

Author keywords

BEOL cleaning; Cryogenic cleaning; FEOL cleaning; IC manufacturing; Particle removal efficiency

Indexed keywords

ADHESION; AEROSOLS; CRYOGENICS; DEFECTS; MAGNETIC RECORDING; SLURRIES;

BEOL CLEANING; CRYOGENIC CLEANING; FEOL CLEANING; IC MANUFACTURING; PARTICLE REMOVAL EFFICIENCY;

CARBON DIOXIDE;

EID: 25444460865     PISSN: 01694243     EISSN: None     Source Type: Journal    
DOI: 10.1163/1568561054867828     Document Type: Article

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