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Volumn 79, Issue 2, 2003, Pages 175-201

Particle removal mechanisms in cryogenic surface cleaning

Author keywords

Carbon dioxide snow; Cryogenic cleaning; Detachment mechanism; Impact detachment; Particle adhesion

Indexed keywords

ADHESION; CARBON DIOXIDE; COMPOSITION EFFECTS; CRYOGENICS; FLOW OF FLUIDS; HYDRODYNAMICS; MATHEMATICAL MODELS; NOZZLES; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER); REMOVAL; TORQUE;

EID: 0042123852     PISSN: 00218464     EISSN: None     Source Type: Journal    
DOI: 10.1080/00218460309570     Document Type: Article
Times cited : (54)

References (35)
  • 1
    • 3643148199 scopus 로고
    • Cleaning surface with dry ice
    • Hoenig, S. A., "Cleaning Surface with Dry Ice." Compressed Air Magazine, 7, 12 (1986).
    • (1986) Compressed Air Magazine , vol.7 , pp. 12
    • Hoenig, S.A.1
  • 2
    • 0025530853 scopus 로고
    • Dry ice snow as a cleaning media for hybrids and integrated circuits
    • Hoenig, S. A., "Dry Ice Snow as a Cleaning Media for Hybrids and Integrated Circuits." Hybrid Circuit Technology, 7, 34 (1990).
    • (1990) Hybrid Circuit Technology , vol.7 , pp. 34
    • Hoenig, S.A.1
  • 3
    • 0042047067 scopus 로고    scopus 로고
    • Today's forecast: It looks like snow
    • Jackson, D. and Carver, B., "Today's Forecast: It Looks Like Snow." Precision Cleaning, 8, 17-29 (1999).
    • (1999) Precision Cleaning , vol.8 , pp. 17-29
    • Jackson, D.1    Carver, B.2
  • 4
    • 0002790934 scopus 로고
    • Adhesion of particles
    • Corn, M., "Adhesion of Particles." J. Aerosol Science, 359 (1966).
    • (1966) J. Aerosol Science , vol.359
    • Corn, M.1
  • 5
    • 49949134280 scopus 로고
    • Particle adhesion. Theory and experiment
    • Krupp, H., "Particle Adhesion. Theory and Experiment." Adv. Colloid Interface Sci., 1, 111-140 (1967).
    • (1967) Adv. Colloid Interface Sci. , vol.1 , pp. 111-140
    • Krupp, H.1
  • 6
    • 49649141295 scopus 로고
    • On hamaker constants: A comparison between hamaker constants and Liftshitz-Van Der Waals constants
    • Visser, J., "On Hamaker Constants: A Comparison Between Hamaker Constants and Liftshitz-Van Der Waals Constants." Adv. Colloid Interface Sci., 3, 331-363 (1972).
    • (1972) Adv. Colloid Interface Sci. , vol.3 , pp. 331-363
    • Visser, J.1
  • 7
    • 33646733743 scopus 로고
    • Surface forces and surface interactions
    • Tabor, D., "Surface Forces and Surface Interactions." J. Colloid Interface Sci., 58, 2-13 (1977).
    • (1977) J. Colloid Interface Sci. , vol.58 , pp. 2-13
    • Tabor, D.1
  • 8
    • 0022122174 scopus 로고
    • An analysis of particle adhesion on semiconductor surfaces
    • Bowling, R. A., "An Analysis of Particle Adhesion on Semiconductor Surfaces." J. Electrochem. Soc., 132, 2208-2219 (1985).
    • (1985) J. Electrochem. Soc. , vol.132 , pp. 2208-2219
    • Bowling, R.A.1
  • 10
    • 0028098329 scopus 로고
    • On particle adhesion and removal mechanisms in turbulent flows
    • Soltani, M. and Ahmadi, G., "On Particle Adhesion and Removal Mechanisms in Turbulent Flows." J. Adhesion Sci. Technol., 8, 763-785 (1994).
    • (1994) J. Adhesion Sci. Technol. , vol.8 , pp. 763-785
    • Soltani, M.1    Ahmadi, G.2
  • 11
    • 0043116551 scopus 로고
    • The London-Van Der Waals attraction between spherical particles
    • Hamaker, H. C., "The London-Van der Waals Attraction Between Spherical Particles." Physica, 4, 1059-1072 (1937).
    • (1937) Physica , vol.4 , pp. 1059-1072
    • Hamaker, H.C.1
  • 12
    • 0002779092 scopus 로고
    • The theory of molecular attractive forces between solids
    • Lifshitz, E. M., "The Theory of Molecular Attractive Forces Between Solids." Soviet Phys., JETP, 2, 73-83 (1956).
    • (1956) Soviet Phys., JETP , vol.2 , pp. 73-83
    • Lifshitz, E.M.1
  • 13
    • 0010461312 scopus 로고
    • Untersuchungen Über Die Reibung and Adhäsion, IV
    • Derjaguin, B. V., "Untersuchungen Über Die Reibung and Adhäsion, IV." Kolloidn. Zhur., 69, 155-164 (1934).
    • (1934) Kolloidn. Zhur. , vol.69 , pp. 155-164
    • Derjaguin, B.V.1
  • 14
  • 15
    • 33244484721 scopus 로고
    • Effect of contact deformations on the adhesion of particles
    • Derjaguin, B., Muller, V. and Toporov, Y., "Effect of Contact Deformations on the Adhesion of Particles." J. Colloid Interface Sci., 53, 314-326 (1975).
    • (1975) J. Colloid Interface Sci. , vol.53 , pp. 314-326
    • Derjaguin, B.1    Muller, V.2    Toporov, Y.3
  • 16
    • 33846822517 scopus 로고
    • On the influence of molecular forces on the deformation of an elastic sphere and its sticking to a rigid plane
    • Muller, V., Yushenko, V. and Derjaguin, B., "On the Influence of Molecular Forces on the Deformation of an Elastic Sphere and Its Sticking to a Rigid Plane." J. Colloid Interface Sci., 77, 91-101 (1980).
    • (1980) J. Colloid Interface Sci. , vol.77 , pp. 91-101
    • Muller, V.1    Yushenko, V.2    Derjaguin, B.3
  • 17
    • 49049126091 scopus 로고
    • General theoretical consideration of the influence of surface forces on contact deformations and the reciprocal adhesion of elastic spherical particles
    • Muller, V., Yushenko, V. and Derjaguin, B., "General Theoretical Consideration of the Influence of Surface Forces on Contact Deformations and the Reciprocal Adhesion of Elastic Spherical Particles." J. Colloid Interface Sci., 92, 92-101 (1983).
    • (1983) J. Colloid Interface Sci. , vol.92 , pp. 92-101
    • Muller, V.1    Yushenko, V.2    Derjaguin, B.3
  • 18
    • 0010359394 scopus 로고
    • High velocity carbon dioxide for cleaning vacuum system surfaces
    • Layden, L. and Wadlow, D., "High Velocity Carbon Dioxide for Cleaning Vacuum System Surfaces." J. Ac. Sci. Technol., 8, 3881-3883 (1990).
    • (1990) J. Ac. Sci. Technol. , vol.8 , pp. 3881-3883
    • Layden, L.1    Wadlow, D.2
  • 19
    • 26144442586 scopus 로고
    • Surface cleaning using a cryogenic aerosol
    • US Patent No. 5,062,898
    • McDermott, W., Ockovic, R., Wu, J., Cooper, D., Schwartz, A. and Wolfe, H., "Surface Cleaning Using a Cryogenic Aerosol." US Patent No. 5,062,898. (1991).
    • (1991)
    • McDermott, W.1    Ockovic, R.2    Wu, J.3    Cooper, D.4    Schwartz, A.5    Wolfe, H.6
  • 22
    • 0025750093 scopus 로고
    • Resuspension induced by impacting particles
    • John, W., Fritter, D. and Winklmayr, W., "Resuspension Induced by Impacting Particles." J. Aerosol Sci., 22, 723-736 (1991).
    • (1991) J. Aerosol Sci. , vol.22 , pp. 723-736
    • John, W.1    Fritter, D.2    Winklmayr, W.3
  • 23
    • 0027625984 scopus 로고
    • Breakup of latex doublets by impaction
    • John, W. and Sethi, V., "Breakup of Latex Doublets by Impaction." Aerosol Science and Technology, 19, 57-68 (1993).
    • (1993) Aerosol Science and Technology , vol.19 , pp. 57-68
    • John, W.1    Sethi, V.2
  • 24
    • 0031270833 scopus 로고    scopus 로고
    • Nanoqueous processes provide critical cleaning alternatives
    • Kohli, R., "Nanoqueous Processes Provide Critical Cleaning Alternatives." Precision Cleaning, 5, 19-23 (1997).
    • (1997) Precision Cleaning , vol.5 , pp. 19-23
    • Kohli, R.1
  • 26
    • 0033075144 scopus 로고    scopus 로고
    • A theoretical analysis of wafer cleaning using a cryogenic aerosol
    • Narayanswami, N., "A Theoretical Analysis of Wafer Cleaning using a Cryogenic Aerosol." J. of the Electrochemical Society, 146, 767-774 (1999).
    • (1999) J. of the Electrochemical Society , vol.146 , pp. 767-774
    • Narayanswami, N.1
  • 27
    • 0000907976 scopus 로고
    • A sphere in contact with a plane wall in a slow linear shear flow
    • O'Neill, M., "A Sphere in Contact with a Plane Wall in a Slow Linear Shear Flow." Chem. Eng. Sci., 23, 1293-1298 (1968).
    • (1968) Chem. Eng. Sci. , vol.23 , pp. 1293-1298
    • O'Neill, M.1
  • 28
    • 84954733866 scopus 로고
    • The lift on a small sphere in a slow shear flow
    • Saffman, P. G., "The Lift on a Small Sphere in a Slow Shear Flow." J. Fluid Mechanics, 22, 385-395 (1965).
    • (1965) J. Fluid Mechanics , vol.22 , pp. 385-395
    • Saffman, P.G.1
  • 30
    • 0025790864 scopus 로고
    • Particle detachment from disk surfaces of computer disk drives
    • Tsai, C. J., Pui, D. Y. H. and Liu, B. Y. H., "Particle Detachment from Disk Surfaces of Computer Disk Drives." J. Aerosol Sci. Technology, 22, 737-746 (1991).
    • (1991) J. Aerosol Sci. Technology , vol.22 , pp. 737-746
    • Tsai, C.J.1    Pui, D.Y.H.2    Liu, B.Y.H.3
  • 31
    • 0025499615 scopus 로고
    • Effects of inceptive motion on particle detachment
    • Wang, C., "Effects of Inceptive Motion on Particle Detachment." Aerosol Sci. Technol., 13, 386-396 (1990).
    • (1990) Aerosol Sci. Technol. , vol.13 , pp. 386-396
    • Wang, C.1
  • 32
    • 0347571407 scopus 로고
    • A sub layer model for the deposition of particles from a turbulent flow
    • Cleaver, J. W. and Yates, B., "A Sub Layer Model for the Deposition of Particles from a Turbulent Flow." Chem. Eng. Sci., 30, 983-992 (1975).
    • (1975) Chem. Eng. Sci. , vol.30 , pp. 983-992
    • Cleaver, J.W.1    Yates, B.2
  • 33
    • 0022664843 scopus 로고
    • A model for turbulent deposition of aerosols
    • Fichman, M., Gutfinger, C. and Pnueli, D., "A Model for Turbulent Deposition of Aerosols." J. Aerosol Sci., 19, 123-136 (1988).
    • (1988) J. Aerosol. Sci. , vol.19 , pp. 123-136
    • Fichman, M.1    Gutfinger, C.2    Pnueli, D.3
  • 34
    • 0002804515 scopus 로고
    • A sublayer model for turbulent deposition of particles in vertical ducts with smooth and rough surfaces
    • Fan, F. and Ahmadi, G., "A Sublayer Model for Turbulent Deposition of Particles in Vertical Ducts with Smooth and Rough Surfaces." J. Aerosol Sci., 24, 45-64 (1993).
    • (1993) J. Aerosol Sci. , vol.24 , pp. 45-64
    • Fan, F.1    Ahmadi, G.2
  • 35
    • 0042047066 scopus 로고    scopus 로고
    • Experimental study of particle removal in cryogenic surface cleaning
    • (to be submitted)
    • Toscano, C. and Ahmadi, G., "Experimental Study of Particle Removal in Cryogenic Surface Cleaning." J. Adhesion (to be submitted) (2003).
    • (2003) J. Adhesion
    • Toscano, C.1    Ahmadi, G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.