Si3N4 particle removal efficiency study

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 27-32

  Liu, Jane Qian ^a   Lee, Carolyn ^a   Rosamilia, Joseph M ^a   Boone, Tom ^a   Czitrom, Veronica ^a   Higashi, Gregg S ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; PARTICLE SIZE ANALYSIS; SILICON NITRIDE; THERMAL EFFECTS; ULTRASONIC CLEANING;

MEGASONIC CLEANING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030678804     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)