Structure and tribological properties of DLC films deposited by DC-RF-PECVD

Mocaxue Xuebao/Tribology

Volumn 24, Issue 1, 2004, Pages 1-5

  Li, Hong Xuan ^a   Xu, Tao ^a   Chen, Jian Min ^a   Zhou, Hui Di ^a   Liu, Hui Wen ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

DC RF PECVD; DLC film; Structure; Tribological properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; FRICTION; INFRARED SPECTROMETERS; MICROSTRUCTURE; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

TRIBOLOGICAL PROPERTIES; WEAR BEHAVIORS;

DIAMOND LIKE CARBON FILMS;

EID: 2542536044     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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