Floating nano-dot MOS capacitor memory arrays without cell transistors

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 719-724

  Winkler, O ^a   Baus, M ^a   Spangenberg, B ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Flash memory; Floating dot; LPCVD; Memory array; Nano dot

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC VARIABLES MEASUREMENT; ETCHING; FLASH MEMORY; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY;

CROSSBAR WIRES; FLOATING DOTS; MEMORY ARRAYS; NANO-DOTS;

MOS CAPACITORS;

EID: 2542417543     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00209-6     Document Type: Conference Paper

References (4)

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