Effect of electrode pattern on the performance of unimorph piezoelectric diaphragm actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5764, Issue , 2005, Pages 42-49

  Wright, Rika ^a   Mo, Changki ^b   Clark, William W ^a  

^a University of Pittsburgh   (United States)

^b Kyungpook National University   (South Korea)

Author keywords

Actuator; Circular diaphragm; Electrode pattern; Piezoelectric; Unimorph

Indexed keywords

CIRCULAR DIAPHRAGM; ELECTRODE PATTERN; PIEZOELECTRIC; UNIMORPH;

DIAPHRAGMS; PIEZOELECTRIC DEVICES; PRESSURE EFFECTS;

ACTUATORS;

EID: 25144517387     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601985     Document Type: Conference Paper

References (14)

1. Monies, C. J.nd Foster, F. K., "Optimization of a circular piezoelectric bimorph for a micropump driver", J. Micromech. Microeng., Vol. 10, pp. 459-465, 2000.
2. Seitz, H. and Heinzl, J., "Modelling of a microfluidic device with piezoelectric actuators", J. Micromech. Microeng., Vol. 14, pp. 1140-1147, 2004.
3. Kim, Sunghwan, Low Power Energy Harvesting with Piezoelectric Generator, Ph.D. Dissertation, University of Pittsburgh, Pittsburgh, PA, 2002.
4. Kim, Sunghwan, Clark, W. W., and Wang, Q. M., "Piezoelectric Energy Harvesting With a Clamped Circular Plate: Analysis", in press for the Journal of Intelligent Material Systems and Structures, Special Issue on Energy Harvesting, 2005.
5. Kim, Sunghwan, Clark, W. W., and Wang, Q. M., "Piezoelectric Energy Harvesting With a Clamped Circular Plate: Experimental Study", in press for the Journal of Intelligent Material Systems and Structures, Special Issue on Energy Harvesting, 2005.
6. Stavsky, Y. and Loewy, R., "Axisymmetric Vibrations of Isotropic Composite Circular Plates", J. Acoust. Soc. Am., Vol. 49, No. 5(2), pp. 1542-1550, 1971.
7. Adelman, N. T., and Stavsky, Y., "Flexural-extensional behavior of composite piezoelectric circular plates," J. of Acoust. Soc. Am., Vol. 67(3), pp. 819-822., March 1980.
8. Prasad, S. A. N., Sankar, B. V., Cattafesta, L. N., Horowitz, S., Gallas, Q., and Sheplak, M., "Two-Port Electroacoustic Model of an Axisymmetric Piezoelectric Composite Plate," AIAA-2002-1365, Denver, Colorado, April 22-25, 2002.
9. Wang, G., Sankar, B. V., Cattafesta, L. N., and Sheplak, M., "Analysis of a Composite Piezoelectric Circular Plate with Initial Stresses for MEMS," IMECE2002-39337, New Orleans, LA, November 17-22, 2002.
10. Liu, C., Cui, T., and Zhou, Z., "Modal Analysis of a Unimorph Piezoelectrical Transducer", Microsystem Technologies 9, pp. 474-479, Springer-Verlag 2003.
11. Tiersten, H. F., "Electroelastic equations for electroded thin plates subject to large driving voltages," J. Appl. Phys., Vol. 74(5), pp.3389-3393, September 1993.
12. Timoshenko and Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill book Company, 1959.
13. Vinson, J. R., Structural Mechanics: The Behavior of Plates and Shells, A Wiley-Interscience publication, 1974.
14. Leissa, A. W., Vibration of Plates, NASA SP-160, Office of Technology Utilization, Washington, D.C., 1969.