Deposition and characterization of Ti-Ni-Pd and Ti-Ni-Pt shape memory alloy thin films

Smart Materials and Structures

Volumn 14, Issue 5, 2005, Pages

  Mohanchandra, K P ^a   Shin, Daniel ^a   Carman, G P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUSTENITE; CHARACTERIZATION; COMPOSITION; CRYSTALLIZATION; DEPOSITION; DIFFERENTIAL SCANNING CALORIMETRY; FABRICATION; MAGNETRON SPUTTERING; SHAPE MEMORY EFFECT; SILICA; TITANIUM ALLOYS; X RAY DIFFRACTION ANALYSIS;

MARTENSITIC PHASE; TRANSFORMATION TEMPERATURES; WAFER CURVATURE METHODS;

THIN FILMS;

EID: 25144469625     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/14/5/021     Document Type: Conference Paper

References (13)

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