Comprehensive study of Ohmic electrical characteristics and optimization of TiAlMoAu multilayer Ohmics on undoped AlGaNGaN heterostructure

Journal of Applied Physics

Volumn 98, Issue 5, 2005, Pages

  Sun, Yunju ^a   Chen, Xiaodong ^a   Eastman, L F ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURE; METAL STACK SYSTEM; OHMIC ELECTRICAL CHARACTERISTICS; SAPPHIRE SUBSTRATES;

ALUMINUM COMPOUNDS; ANNEALING; MOLECULAR BEAM EPITAXY; OHMIC CONTACTS; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY;

TITANIUM COMPOUNDS;

EID: 25144439898     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2035314     Document Type: Article

References (7)

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