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Volumn 66, Issue SUPPL. 1, 1998, Pages
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A three-dimensional scanner for probemicroscopy on the millimeter scale
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPES;
HIGH RESOLUTION;
NANOMETRES;
OPTICAL MICROSCOPES;
SCAN RANGE;
SCANNING PROBE MICROSCOPE;
ELECTROACOUSTIC TRANSDUCERS;
MICROSCOPES;
SCANNING;
THREE DIMENSIONAL;
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EID: 25044467496
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s003390051257 Document Type: Article |
Times cited : (9)
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References (11)
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