Normal and lateral force images, sub-angstrom height resolution, and midlevel lateral resolution with a phonograph cartridge as scanning force sensor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 845-848

  Mariani, Tullio ^a   Frediani, Carlo ^a   Ascoli, Cesare ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243158613     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588727     Document Type: Article

References (9)

1. T. Mariani, C. Ascoli, and C. Frediani, Rev. Sci. Instrum. 66, 5334 (1996).
2. O. Marti, J. Colchero, and J. Mlynek, Nanotechnology 1, 141 (1990).
3. G. Meyer and N. M. Amer, Appl. Phys. Lett. 57, 2089 (1990).
4. J. Tansock and C. C. Williams, Ultramicroscopy 42-44, 1464 (1992).
5. T. Mariani, A. Musio, C. Frediani, I. Sbrana, and C. Ascoli, J. Microsc. 176, 121 (1994).
6. J. M. Bennet and J. H. Dancy, Appl. Opt. 20, 1785 (1981).
7. C. Ascoli et al., J. Vac. Sci. Technol. B 12, 1642 (1994).
8. M. Allegrini et al., Il Nuovo Cimento D 15, 279 (1993).
9. M. Allegrini, C. Ascoli, and A. Gozzini, Opt. Commun. 2, 435 (1970).