A spectral vibration detection system based on tunable micromechanical resonators

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 63-72

  Scheibner, D ^a   Mehner, J E ^b,c   Reuter, D ^b   Gessner, T ^b,c   Dotzel W ^b  

^a SIEMENS AG   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c FRAUNHOFER IZM   (Germany)

Author keywords

Resonant; SCREAM; Tuning; Vibration

Indexed keywords

FREQUENCY TUNING; MICROMECHANICAL RESONATORS; SENSOR STRUCTURE; VIBRATION DETECTION;

BANDWIDTH; COMPOSITE MICROMECHANICS; ELECTRIC POTENTIAL; FREQUENCIES; RESONANCE; SENSORS;

VIBRATION MEASUREMENT;

EID: 24944549409     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.034     Document Type: Conference Paper

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