Observations on the formation and ashing of giant folds in high dose ion-implanted resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 95-100

  Menagarishvili, Vladimir M ^a  

^a MC Electronics Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644518151     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

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2. K. J. Orvek and C. Huffman, Nucl. Instrum. Methods Phys. Res. B 7/8, 501 (1985).
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5. G. K. Vinogradov, V. M. Menagarishvili, and S. Yoneyama, J. Vac. Sci. Technol. A 16, 1444 (1998).