Probe diagnostics in a full wave resonator radio-frequency discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1444-1448

  Vinogradov, G K ^a   Menagarishvili, V M ^a   Yoneyama, S ^a  

^a MC Electronics Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL POSITIONS; CHAMBER WALLS; CYLINDRICAL LANGMUIR PROBE; ELECTRON DENSITIES; EXCITATION ZONES; FLOATING POTENTIALS; FULL WAVES; GAS TEMPERATURE; HIGH-POWER; INDUCTIVE PLASMA SOURCES; PLASMA TOROID; PRESSURE DISCHARGES; PROBE SURFACE; PROBE TECHNIQUE; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; SPHERICAL PROBES;

ELECTRIC DISCHARGES; OXYGEN; PLASMA SOURCES; RESONATORS;

PROBES;

EID: 0343699561     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581166     Document Type: Article

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