Research and development in plasma-based ion implantation in Europe. I. Apparatus and projects

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 799-807

  Ensinger, W ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644509328     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590642     Document Type: Article

References (25)

1. J. R. Conrad and C. Forest, in IEEE International Conference on Plasma Science, Saskatoon, Canada, 19-21 May 1986 (IEEE, New York, 1986), p. 28.
2. J. R. Conrad and T. Castagna, Bull. Am. Phys. Soc. 31, 1479 (1986).
3. J. R. Conrad, J. Appl. Phys. 62, 777 (1987).
4. J. Tendys, I. J. Donnelly, M. J. Kenny, and J. T. A. Pollock, Appl. Phys. Lett. 53, 2143 (1988).
5. G. A. Collins, R. Hutchings, and J. Tendys, Mater. Sci. Eng., A 139, 171 (1991).
6. B. Mizuno, I. Nakayama, N. Aoi, M. Kubota, and T. Komeda, Appl. Phys. Lett. 53, 2059 (1988).
7. N. W. Cheung, Nucl. Instrum. Methods Phys. Res. B 55, 811 (1991).
8. W. Ensinger, Mater. Sci. Eng., A 253, 258 (1998).
9. J. Brutscher, R. Günzel, and W. Möller, Plasma Sources Sci. Technol. 5, 54 (1996).
10. G. Böhm and R. Günzel, J. Vac. Sci. Technol. B 12, 821 (1994).
11. R. W. Thomae, B. Seiler, H. Bender, J. Brutscher, A. Jakob, H. Klein, A. Maaser, J. Müller, M. Sarstedt, and M. Weber, in Ion Implantation Technology-94, edited by S. Coffa, G. Ferla, F. Priolo, and E. Rimini (Elsevier Science, Amsterdam, 1995), p. 989.
12. A. Kazor, R. M. Gwilliam, C. Jeynes, M. J. Blewett, and B. J. Sealy, in Ion Implantation Technology-94, edited by S. Coffa, G. Ferla, F. Priolo, and E. Rimini (Elsevier Science, Amsterdam, 1995), p. 994.
13. I. Pintér, M. Ádám, Cs. Dücsö, N. Q. Khánh, and I. Bársony, Proceedings of the 10th International Colloquium on Plasma Processes CIP '95, June 1995, Antibes, p. 118.
14. G. A. Collins, R. Hutchings, K. T. Short, J. Tendys, and C. H. Van Der Valk, Surf. Coat. Technol. 84, 537 (1996).
15. G. A. Collins, K. T. Short, and J. Tendys, Surf. Coat. Technol. 93, 181 (1997).
16. C. Blawert, B. L. Mordike, G. A. Collins, K. T. Short, and J. Tendys, Surf. Coat. Technol. 103/104, 240 (1998).
17. W. Ensinger, J. Klein, P. Usedom, and B. Rauschenbach, Surf. Coat. Technol. 93, 175 (1997).
18. S. Schoser, J. Forget, and K. Kohlhof, Surf. Coat. Technol. 93, 339 (1997).
19. J. Brutscher, Rev. Sci. Instrum. 67, 2621 (1996).
20. F. LeCoeur, Y. Arnal, R. R. Burke, O. Lesaint, and J. Pelletier, Surf. Coat. Technol. 93, 265 (1997).
21. F. LeCoeur, T. Lagarde, J. Pelletier, Y. Arnal, R. Burke, and M. Brunel, Rev. Sci. Instrum. 69, 831 (1998).
22. J. Brückner, R. Günzel, E. Richter, and W. Möller, Surf. Coat. Technol. 103/104, 227 (1998).
23. G. A. Collins, R. Hutchings, K. T. Short, and J. Tendys, Surf. Coat. Technol. 103/104, 212 (1998).
24. W. Ensinger, B. Enders, and O. Lensch, Surf. Coat. Technol. (in press).
25. F. Alonso, M. Rinner, A. Loinaz, J. I. Oñate, W. Ensinger, and B. Rauschenbach, Surf. Coat. Technol. 93, 305 (1997).