Sheath dynamics in plasma immersion ion implantation

Plasma Sources Science and Technology

Volumn 5, Issue 1, 1996, Pages 54-60

  Brutscher, Jörg ^a   Günzel, Reinhard ^a   Möller, Wolfhard ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; MATHEMATICAL MODELS; PLASMA PROBES; PLASMA SHEATHS; SUPERSONIC FLOW;

LANGMUIR PROBES; PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 0030073659     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/1/007     Document Type: Article

References (23)

1. Conrad J R and Radke J R 1987 J. Appl. Phys. 62 4591
2. Adler R J 1985 Nucl. Instrum. Methods B 6 123
3. Brown I G, Anders A, Anders S, Dickinson M R and MacGill R A 1994 J. Vac. Sci. Technol. B 12 823
4. [41 Günzel R, Wieser E, Richter E and Steffen J 1994 J. Vac. Sci. Technol. B 12 927
5. Conrad J R 1987 J. Appl. Phys. 62 777
6. Wang D 1994 J. Appl. Phys. 75 1335
7. Vahedi V, Lieberman M M A, Alves M V, Verboncoeur J P and Birdsall C K 1991 J. Appl. Phys. 69 2008
8. Shamin M, Scheuer J T and Conrad J R 1991 J. Appl. Phys. 69 2904
9. Shamin M M, Scheuer J T, Fetherston R P and Conrad J R 1991 J. Appl. Phys. 70 4756
10. Stewart R A and Liebermann M A 1991 J. Appl. Phys. 70 3481
11. Wang D, Ma T and Deng X 1993 J. Appl. Phys. 74 2986
12. Scheuer J T, Shamin M and Conrad J R 1990 J. Appl. Phys. 67 1241
13. Chen F 1974 Introduction to Plasma Physics (New York: Plenum)
14. Riemann K U 1991 J. Phys. D: Appl. Phys. 24 493
15. Anders A 1990 A Formulary for Plasma Physics (Berlin: Akademie-Verlag)
16. En W and Cheung N W 1994 J. Vac. Sci. Technol. B 12 828
17. Collins G A and Tendys J 1994 Plasma Sources Sci. Technol. 3 10
18. Langmuir I and Blodgett K 1923 Phys. Rev. 22 347
19. Langmuir I and Blodgett K 1924 Phys. Rev. 24 49
20. Böhm G and Günzel R 1994 J. Vac. Sci. Technol. B 12 821
21. Göckner M J and Maik S M 1994 Phys. Plasmas 1 1064
22. Szapiro B and Rocca J J 1989 J. Appl. Phys. 65 3713
23. Industrielle Vakuumtechnik 1980 Leipzig: VEB Deutscher Verlag für Grundstoffindustrie