Chromium reactive sputtering in argon-oxygen and argon-water vapor mixtures

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 425-430

  Nouvellon, Corinne ^a   Dauchot, J P ^b   Hecq, M ^b   Cornil, H ^c  

^a MATERIA NOVA RESEARCH CENTER   (Belgium)

^b UNIVERSITY OF MONS   (Belgium)

^c Arcelor Innovation   (Belgium)

Author keywords

Chromium; Oxygen; Plasma diagnostics; Reactive sputtering; Water vapor

Indexed keywords

ARGON; CHROMIUM; COMPOSITION EFFECTS; FLOW OF FLUIDS; LIGHT EMISSION; MIXTURES; OXYGEN; PLASMA DIAGNOSTICS; PRESSURE EFFECTS; PROTECTIVE COATINGS; SPUTTER DEPOSITION; WATER;

ARGON FLOW; PLASMA ION SPECIES; REACTIVE SPUTTERING; WATER VAPOR;

MAGNETRON SPUTTERING;

COATING;

EID: 24644496661     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.145     Document Type: Article

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