Tandem accel lens advantageous in producing a small spot focused ion beam

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 82-85

  Nomura, Setsuo ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644483746     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590519     Document Type: Article

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