Integrated high voltage modulator for plasma immersion ion implantation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 895-899

  Gunzel R ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644482483     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590658     Document Type: Article

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