Optical characterization of 193nm amorphous carbon ARC films

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue III, 2005, Pages 1161-1172

  Leng, Jingmin ^a   Opsal, Jon ^a   Pois, Heath ^a  

^a Therma Wave Inc   (United States)

Author keywords

Absolute ellipsometry (AE); Amorphous carbon; Anisotropy; Beam profile reflectometry (BPR); Dispersion; MDGA; Spectroscopic ellipsometry (SE); Spectroscopic reflectometry or broadband (BB)

Indexed keywords

ABSOLUTE ELLIPSOMETRY (AE); AMORPHOUS CARBON; BEAM PROFILE REFLECTOMETRY (BPR); DISPERSION; MDGA; SPECTROSCOPIC ELLIPSOMETRY (SE); SPECTROSCOPIC ELLIPSOMETRY OR BROADBAND (BB);

AMORPHOUS FILMS; ANISOTROPY; APPROXIMATION THEORY; ELLIPSOMETRY; FOURIER TRANSFORMS; MATHEMATICAL MODELS; OPTICAL PROPERTIES; REFLECTOMETERS;

CARBON;

EID: 24644473582     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600138     Document Type: Conference Paper

References (5)

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5. R. M. A. Azzam and N. M. Bashra, Ellipsometry and Polarized Light, Amsterdam: North-Holland (1977).